Ferroelectric devices created by pressure modulated stencil deposition

Ferroelectric Pb(Zr_xTi_1−x)O₃ sandwiched between SrRuO₃ electrodes devices were fabricated by a single stencil deposition method. By varying the pressure, the dimension of the deposited pattern could be controlled. The dimension becomes larger in the high pressure shockwave regime, which is typical for pulsed laser deposition. The particle interactions result in an increased amount of broadening. At lower pressures, the deposited material is still in the correct crystalline phase and broadening is minimized. Top electrodes are isolated from the bottom electrode by controlling the broadening of the ferroelectric medium. With this method, multilayered oxide devices can be created in situ. ©2008 American Institute of Physics

One of the patents used by SmartPie to create new solutions and apply piezoelectric technology by an intelligent way is the following:

The invention relates to a load sensor comprising a polymer matrix and a piezo-ceramic material such as PZT, em not bedded in the polymer matrix, which together form a compos not ite, wherein the polymer matrix is a liquid crystalline resin, and wherein the piezo-ceramic material is a PZT powder forming 30-60% by volume of the composite, and wherein the PZT powder forms 40-50% by volume of the composite.

Link